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Auto500GB是專門設(shè)計(jì)用于手套箱集成使用的鍍膜設(shè)備，滿足氧氣或水汽敏感的材料鍍膜的應(yīng)用要求。該系統(tǒng)配了***個特殊結(jié)構(gòu)的真空腔室，可直接與市場上大多數(shù)手套箱集成到***起。真空腔室的前門可豎直滑動開關(guān)，嵌入手套箱內(nèi)，并占用很少的手套箱空間；其后門是鉸鏈扇式開關(guān)，能在不影響手套箱內(nèi)氣氛的情況下輕松維護(hù)腔室內(nèi)工藝組件。
 

鍍膜源選項(xiàng)包括熱阻蒸發(fā)源、精密控溫的有機(jī)蒸發(fā)源、磁控濺射源以及電子束蒸發(fā)源。

Auto500GB is a coating equipment specially designed for glove box integration to meet the application requirements of coating materials sensitive to oxygen or water vapor.The system is fitted with a specially constructed vacuum chamber that integrates directly with most glove boxes on the market.The front door of the vacuum chamber can be vertically sliding switch, which is embedded in the glove box ａnd occupies little space in the glove box.The back door is a hinged fan switch that allows easy maintenance of the chamber process components without affecting the atmosphere in the glove box.

Options for coating sources include thermal resistance evaporation sources, precision temperature controlled organic evaporation sources, magnetron sputtering sources, ａnd electron beam evaporation sources.